Research Fellow (EUV Nanophotonics & Nanopatterning) Full-time

Research Fellow In Euv Nanophotonics And Nanopatterning

The LUMINOUS! Centre of Excellence for Semiconductor Lighting and Displays at NTU is seeking a Research Fellow in EUV Nanophotonics and Nanopatterning to join the NRF Competitive Research Programme project, “Extreme UV Nanophotonics: Quantum Control and Meta-Optical Design of Extreme Ultraviolet Light Sources.”

In this role, you will turn theory into practical technology by fabricating chip-scale, free-electron-driven EUV sources and approximately 10 nm electron-beam-lithography masks. You will integrate these devices with advanced vacuum and electron-optical systems to achieve high-brightness emission at short wavelengths. You will lead the first proof-of-concept demonstration of EUV nanopatterning using a chip-scale source, strengthening NTU's leadership in EUV nanophotonics and opening new possibilities for semiconductor lithography and metrology.

Key Responsibilities:

• Experimental Platform Development: Lead the design and assembly of high-vacuum and ultra-high vacuum (UHV) systems, custom vacuum chambers and optical setups tailored for free-electron–light interaction and EUV generation.
• Chip-Scale Source Development: Lead the development, fabrication, and integration of chip-scale EUV emitter components, including cathode nanostructures (e.g., ZnO, graphene, carbon nanotubes) and Si/Mo multilayer anode structures, using sputtering, chemical vapor deposition (CVD), and high-vacuum bonding/sealing techniques.
• EUV Nanopatterning Masks: Design and fabricate EUV nanopatterning masks (Si3N4 membrane on Si substrate) using electron-beam lithography and metal dry-etching processes to achieve nanopattern feature sizes of approximately 10 nm.
• Beam and Device Characterization: Implement and optimize electron-optical systems and diagnostic tools, including cold cathode field emission testing, to characterize electron beam properties, beam-matter interactions at the nanoscale, and device performance.
• EUV Metrology: Oversee the detection and spectral analysis of EUV radiation, ensuring high-fidelity measurements of brightness and coherence.
• Hardware Integration and Packaging: Collaborate with theorists and fabrication experts to integrate functional nanostructures (e.g., cathode/anode structures, multilayer waveguides, and nanopatterned masks) into experimental vacuum environments and perform the alignment and packaging of EUV-emitting chip-scale devices and masks.
• Proof-of-Concept Demonstrations: Conduct proof-of-concept demonstrations of EUV nanopatterning with sub-10 nm alignment precision and support the scaling of single-chip devices into multi-chip arrays for higher power output.
• Laboratory Leadership: Manage experimental workflows, oversee laboratory and cleanroom safety, and provide technical mentorship to PhD and MSc students, research assistants, and junior researchers.
• Research Dissemination: Publish research findings in leading international journals, present at prestigious international conferences and contribute to grant reporting, patent applications, and other project documentation.

Job Requirements:

• PhD and prior postdoctoral experience in Physics, Electrical Engineering, Materials Science, Applied Physics, Nanotechnology, Photonics, or a related field.
• Significant experience with electron beam systems (e.g., SEMs/TEMs or custom electron guns) and beam–matter interactions.
• Proficiency in the design and maintenance of high-vacuum and Ultra-High Vacuum (UHV) systems, including chip-scale device packaging and high-vacuum bonding/sealing techniques.
• Strong hands-on nanofabrication experience, including electron-beam lithography, photolithography, thin-film deposition (sputtering, chemical vapor deposition), and reactive-ion or metal dry etching.
• Demonstrated experience in fabricating and characterizing nanoscale and multilayer thin-film structures (e.g., metal, semiconductor, or oxide multilayers) and membrane structures such as Si3N4.
• Experience in the EUV or soft X-ray regime (e.g., synchrotron beamlines, or HHG), and familiarity with EUV detectors (CCDs, MCPs) and grazing incidence optics.
• Experience with cold cathode fabrication (e.g., ZnO, graphene, carbon nanotubes) and field emission characterization, or with nanophotonics/meta-optics and characterization of photonic nanostructures (e.g., FIB, COMSOL, Ansys, MEEP).
• Proven track record of publishing high-quality research in internationally recognized peer-reviewed journals, with excellent scientific communication and technical writing skills.
• Strong leadership, organizational, and interpersonal skills, with experience managing laboratory operations, experimental workflows, and safety compliance, and the ability to mentor students and collaborate in multidisciplinary, international research teams.
• Highly independent and hands-on, and capable of troubleshooting complex, first-of-their-kind experimental systems.

We regret that only shortlisted candidates will be notified.

Hiring Institution: NTU